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Development and characterization of a combinative technique for improving the polishing performance of diamond microarray dresser
Shih, Ching-Jui, Yeh, Chia-Hung, Lin, Chao-Sung, Pan, Yung-NingVolume:
29
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2012.08.004
Date:
September, 2012
File:
PDF, 1.83 MB
english, 2012