Etchant Anisotropy Controls the Step Bunching Instability...

Physical Review Letters 2004 / 10 Vol. 93; Iss. 16

Etchant Anisotropy Controls the Step Bunching Instability in KOH Etching of Silicon

Garcia, Simon P., Bao, Hailing, Hines, Melissa A.
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Volume:
93
Language:
english
Journal:
Physical Review Letters
DOI:
10.1103/physrevlett.93.166102
Date:
October, 2004
File:
PDF, 725 KB
english, 2004
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