About the internal pressure in cavities derived from implantation-induced blistering in semi-conductors
Parry, G., Coupeau, C., Dion, E., David, M.-L., Colin, J., Grilhe, J.Volume:
110
Year:
2011
Language:
english
DOI:
10.1063/1.3664741
File:
PDF, 1.79 MB
english, 2011