SPIE Proceedings [SPIE XI Feofilov Symposium on Spectropscopy of Crystals Activated by Rare-Earth and Transition Metal Ions - Kazan, Russia (Monday 24 September 2001)] XI Feofilov Symposium on Spectroscopy of Crystals Activated by Rare-Earth and Transition Metal Ions - VUV spectroscopy of nominally pure and rare-earth ions doped LiCaAIF6 single crystals as promising materials for 157 nm photolithography

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