[IEEE ASDAM '98. Conference Proceedings. Second International Conference on Advances Semiconductor Devices and Microsystems - Smolenice Castle, Slovakia (5-7 Oct. 1998)] ASDAM '98. Conference Proceedings. Second International Conference on Advanced Semiconductor Devices and Microsystems (Cat. No.98EX172) - Nitrogen influence on the properties of the α-C films and α-C/Si heterojunction
Semikina, T.V., Shmyryeva, A.N.Year:
1998
Language:
english
DOI:
10.1109/asdam.1998.730162
File:
PDF, 307 KB
english, 1998