In-Line Supermapping of Storage Capacitor for Advanced...

IEEE Transactions on Device and Materials Reliability 2013 / 03 Vol. 13; Iss. 1

In-Line Supermapping of Storage Capacitor for Advanced Stack DRAM Reliability

Lee, Chung-Yuan, Lai, Chao-Sung, Hu, Yaw-Wen, Wang, Wun, Chen, Hao-Jan, Tian, Yun-Zong, Yang, Chia-Ming, Wang, David H.-L.
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Volume:
13
Language:
english
Journal:
IEEE Transactions on Device and Materials Reliability
DOI:
10.1109/tdmr.2012.2211875
Date:
March, 2013
File:
PDF, 529 KB
english, 2013
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