Relaxation oscillations of low-frequency Ar/SF...

Plasma Sources Science and Technology 2003 / 08 Vol. 12; Iss. 3

Relaxation oscillations of low-frequency Ar/SF 6 inductive plasma discharges

Tuszewski, M, White, R R, Wurden, G A
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Volume:
12
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/12/3/313
Date:
August, 2003
File:
PDF, 346 KB
english, 2003
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