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[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Matrix combination of MEMS relays
Fabian, J.H., Niayesh, K., Kotilainen, S., Wapelhorst, E., Niemeyer, L., Strumpler, R.Year:
2004
Language:
english
DOI:
10.1109/mems.2004.1290723
File:
PDF, 323 KB
english, 2004