Growth and characteristics of tantalum oxide thin films deposited using thermionic vacuum arc technology
Vladoiu, Rodica, Ciupina, Victor, Mandes, Aurelia, Dinca, Virginia, Prodan, Madalina, Musa, GeavitVolume:
108
Year:
2010
Language:
english
DOI:
10.1063/1.3503278
File:
PDF, 1.54 MB
english, 2010