Boron Emitter Passivation With Al$_{\bf 2}$O $_{\bf 3}$ and Al$_{\bf 2}$O$_{\bf 3}$/SiN$_{\bm x}$ Stacks Using ALD Al$_{\bf 2}$O $_{\bf 3}$
Richter, Armin, Benick, Jan, Hermle, MartinVolume:
3
Language:
english
Journal:
IEEE Journal of Photovoltaics
DOI:
10.1109/jphotov.2012.2226145
Date:
January, 2013
File:
PDF, 5.32 MB
english, 2013