Precipitation as the phenomenon responsible for the...

Journal of Applied Physics 1982 Vol. 53; Iss. 3

Precipitation as the phenomenon responsible for the electrically inactive phosphorus in silicon

Nobili, D., Armigliato, A., Finnetti, M., Solmi, S.
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Volume:
53
Year:
1982
Language:
english
DOI:
10.1063/1.330646
File:
PDF, 976 KB
english, 1982
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