[IEEE 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Zhuhai, China (2006.01.18-2006.01.21)] 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - A Hybrid Nano-Imprinting Lithography Based on Infrared Pulsed Laser Heating
Lee, Yung-Chun, Chen, Chun-Hung, Liu, Chuan-PuYear:
2006
Language:
english
DOI:
10.1109/nems.2006.334591
File:
PDF, 5.04 MB
english, 2006