Toward smooth MWPECVD diamond films: Exploring the limits...

Surface and Coatings Technology 2012 Vol. 211; Iss. none

Toward smooth MWPECVD diamond films: Exploring the limits of the hydrogen percentage in Ar/H2/CH4 gas mixture

G. Cicala, D. Monéger, D. Cornacchia, P. Pesce, V. Magaletti, G. Perna, V. Capozzi, M. Tamborra
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Volume:
211
Year:
2012
Language:
english
DOI:
10.1016/j.surfcoat.2011.09.065
File:
PDF, 1.09 MB
english, 2012
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