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[IEEE 2007 Power Conversion Conference - Nagoya - Nagoya, Japan (2007.04.2-2007.04.5)] 2007 Power Conversion Conference - Nagoya - The Design and Experiment of Ion Generator Power Supply for Vacuum Sputtering
Chen, Wen-Guang, Rao, Yi-Hua, Shan, Chang-Hong, Fujita, Goro, Yasutoshi, TakemotoYear:
2007
Language:
english
DOI:
10.1109/pccon.2007.373078
File:
PDF, 3.07 MB
english, 2007