An introduction to thin film processing using high-power...

An introduction to thin film processing using high-power impulse magnetron sputtering

Lundin, Daniel, Sarakinos, Kostas
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Volume:
27
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/jmr.2012.8
Date:
March, 2012
File:
PDF, 695 KB
english, 2012
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