Micromachined inertial sensors

Proceedings of the IEEE 1998 Vol. 86; Iss. 8

Micromachined inertial sensors

Yazdi, N., Ayazi, F., Najafi, K.
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Volume:
86
Year:
1998
Language:
english
DOI:
10.1109/5.704269
File:
PDF, 420 KB
english, 1998
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