[IEEE 2011 Second International Conference on Mechanic Automation and Control Engineering (MACE) - Inner Mongolia, China (2011.07.15-2011.07.17)] 2011 Second International Conference on Mechanic Automation and Control Engineering - Research on material removal rate of each element of chemical mechanical polishing
Zhixue Guo,, Qingzhong Li,, Hui Zhang,, Jing Zhai,Year:
2011
Language:
english
DOI:
10.1109/mace.2011.5986998
File:
PDF, 332 KB
english, 2011