Fundamentals of Slurry Design for CMP of Metal and Dielectric Materials
Singh, Rajiv K., Lee, Seung-Mahn, Choi, Kyu-Se, Bahar Basim, G., Choi, Wonseop, Chen, Zhan, Moudgil, Brij M.Volume:
27
Language:
english
Journal:
MRS Bulletin
DOI:
10.1557/mrs2002.245
Date:
October, 2002
File:
PDF, 506 KB
english, 2002