Fabrication of Large-Area Suspended MEMS Structures Using...

IEEE Electron Device Letters 2009 Vol. 30; Iss. 10

Fabrication of Large-Area Suspended MEMS Structures Using GaN-on-Si Platform

Jianan Lv, Zhenchuan Yang, Guizhen Yan, Wenkui Lin, Yong Cai, Baoshun Zhang, Chen, K.J.
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Volume:
30
Year:
2009
Language:
english
DOI:
10.1109/led.2009.2028905
File:
PDF, 342 KB
english, 2009
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