All-metal micromachining for the fabrication of...

Journal of Micromechanics and Microengineering 2008 / 09 Vol. 18; Iss. 9

All-metal micromachining for the fabrication of sub-millimetre and THz waveguide components and circuits

Desmaris, V, Meledin, D, Pavolotsky, A, Monje, R, Belitsky, V
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Volume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/9/095004
Date:
September, 2008
File:
PDF, 1.07 MB
english, 2008
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