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[IEEE Frequency Control Symposium - New Orleans, LA, USA (29-31 May 2002)] Proceedings of the 2002 IEEE International Frequency Control Symposium and PDA Exhibition (Cat. No.02CH37234) - Analysis and experiment of HBAR frequency spectra and applications to characterize the piezoelectric thin film and to HBAR design
Shih-Yung Pao,, Min-Chiang Chao,, Zuoqing Wang,, Chih-Hung Chiu,, Kung-Chih Lan,, Zi-Neng Huang,, Lung-Rung Shih,, Chi-Lin Wang,Year:
2002
Language:
english
DOI:
10.1109/freq.2002.1075851
File:
PDF, 702 KB
english, 2002