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[IEEE IEEE SENSORS 2002 - Orlando, FL, USA (12-14 June 2002)] Proceedings of IEEE Sensors - The analysis of flow rate through orifices of MEMS valves with experimental results
Yanmei Li,, Geng Wang,, Yu-Hsuan Su,, Imin Kao,Volume:
2
Year:
2002
Language:
english
DOI:
10.1109/icsens.2002.1037281
File:
PDF, 544 KB
english, 2002