[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Low-voltage PZT-actuated MEMS switch monolithically integrated with CMOS circuit
Kousuke, Matsuo, Moriyama, Masaaki, Esashi, Masayoshi, Tanaka, ShujiYear:
2012
Language:
english
DOI:
10.1109/memsys.2012.6170367
File:
PDF, 1.88 MB
english, 2012