HfO2-based Thin Films Deposited by RF Magnetron Sputtering

MRS Proceedings 2009 / 1 Vol. 1160

HfO2-based Thin Films Deposited by RF Magnetron Sputtering

Khomenkova, Larysa, Dufour, Christian, Coulon, Pierre-Eugène, Bonafos, Caroline, Gourbilleau, Fabrice
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Volume:
1160
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/proc-1160-h05-08
Date:
January, 2009
File:
PDF, 239 KB
english, 2009
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