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[IEEE 2006 IEEE 8th International Conference on Properties and applications of Dielectric Materials - Bali, Indonesia (2006.06.26-2006.06.30)] 2006 IEEE 8th International Conference on Properties and applications of Dielectric Materials - Capacitance Density Comparison of PECVD Silicon Oxynitride and Silicon Nitride Dielectric for MIM Capacitor
Zoolfakar, Ahmad, Rashid, Nora'Zah, Saman, Rahimah, Ahmad, MohdYear:
2006
Language:
english
DOI:
10.1109/icpadm.2006.284182
File:
PDF, 3.58 MB
english, 2006