Spatial Composition Grading of Binary Metal Alloy Gate...

IEEE Transactions on Electron Devices 2012 / 12 Vol. 59; Iss. 12

Spatial Composition Grading of Binary Metal Alloy Gate Electrode for Short-Channel SOI/SON MOSFET Application

Manna, Bibhas, Sarkhel, Saheli, Islam, Nurul, Sarkar, S., Sarkar, Subir Kumar
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Volume:
59
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/ted.2012.2220143
Date:
December, 2012
File:
PDF, 673 KB
english, 2012
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