On hillocks generated during anisotropic etching of Si in...

On hillocks generated during anisotropic etching of Si in TMAH

Landsberger, L.M., Naseh, S., Kahrizi, M., Paranjape, M.
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Volume:
5
Year:
1996
Language:
english
DOI:
10.1109/84.506198
File:
PDF, 1.58 MB
english, 1996
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