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Impact of diameter fluctuations on thermal stresses during Czochralski silicon growth
Noghabi, Omidreza Asadi, M'Hamdi, Mohammed, Jomâa, MoezVolume:
362
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2011.11.025
Date:
January, 2013
File:
PDF, 1.44 MB
english, 2013