Application of aluminum nitride films for electronic...

Diamond and Related Materials 1999 / 3 Vol. 8; Iss. 2-5

Application of aluminum nitride films for electronic devices

Belyanin, A.F, Bouilov, L.L, Zhirnov, V.V, Kamenev, A.I, Kovalskij, K.A, Spitsyn, B.V
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Volume:
8
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/s0925-9635(98)00412-9
Date:
March, 1999
File:
PDF, 139 KB
english, 1999
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