Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
1996 Vol. 14; Iss. 6
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General aspheric refractive micro‐optics fabricated by optical lithography using a high energy beam sensitive glass gray‐level mask
Daschner, Walter, Long, Pin, Stein, Robert, Wu, Chuck, Lee, S. H.Volume:
14
Year:
1996
Language:
english
DOI:
10.1116/1.588657
File:
PDF, 554 KB
english, 1996