High-sensitivity surface micromachined structures for...

Journal of Micromechanics and Microengineering 1997 / 03 Vol. 7; Iss. 1

High-sensitivity surface micromachined structures for internal stress and stress gradient evaluation

Ericson, Fredric, Greek, Staffan, Söderkvist, Jan, Schweitz, Jan-Åke
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Volume:
7
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/7/1/006
Date:
March, 1997
File:
PDF, 449 KB
english, 1997
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