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[IEEE 2009 IEEE International Conference on Microelectronic Test Structures (ICMTS) - Oxnard, CA, USA (2009.03.30-2009.04.2)] 2009 IEEE International Conference on Microelectronic Test Structures - Mismatch Measure Improvement Using Kelvin Test Structures in Transistor Pair Configuration in Sub-Hundred Nanometer MOSFET Technology
Mezzomo, Cecilia M., Marin, Mathieu, Leyris, Cedric, Ghibaudo, GerardYear:
2009
Language:
english
DOI:
10.1109/icmts.2009.4814611
File:
PDF, 314 KB
english, 2009