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Polymer/Silicon Hard Magnetic Micromirrors
Weber, Niklas, Hertkorn, Daniel, Zappe, Hans, Seifert, AndreasVolume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2203100
Date:
October, 2012
File:
PDF, 1.26 MB
english, 2012