Tuning the Sensitivity of a Metal-Based Piezoresistive...

Journal of Microelectromechanical Systems 2012 / 12 Vol. 21; Iss. 6

Tuning the Sensitivity of a Metal-Based Piezoresistive Sensor Using Electromigration

Mohanasundaram, S. M., Pratap, Rudra, Ghosh, Arindam
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Volume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2211579
Date:
December, 2012
File:
PDF, 507 KB
english, 2012
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