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Ultrahigh-Dynamic-Range Resonant MEMS Load Cells for Micromechanical Test Frames
Azgin, Kivanc, Akin, Tayfun, Valdevit, LorenzoVolume:
21
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2012.2211576
Date:
December, 2012
File:
PDF, 1.98 MB
english, 2012