The method of ion current measurement on capacitive-coupled...

Review of Scientific Instruments 2001 Vol. 72; Iss. 2

The method of ion current measurement on capacitive-coupled plasma

Iseki, Yasushi, Hayashi, Kazuo, Noda, Etsuo
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Volume:
72
Year:
2001
Language:
english
DOI:
10.1063/1.1340022
File:
PDF, 391 KB
english, 2001
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