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High-Resolution Micro-Pirani Pressure Sensor With Transient Response Processing and Time-Constant Evaluation
Legendre, Olivier, Bertin, Hervé, Garel, Olivier, Zhang, Ming, Mathias, Hervé, Mergherbi, Souhil, Juillard, Jérôme, Mailly, FrédérickVolume:
12
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/jsen.2012.2207102
Date:
October, 2012
File:
PDF, 1.25 MB
english, 2012