![](/img/cover-not-exists.png)
[IEEE Proceedings of 35th European Solid-State Device Research Conference, 2005. ESSDERC 2005. - Grenoble, France (12-16 Sept. 2005)] Proceedings of 35th European Solid-State Device Research Conference, 2005. ESSDERC 2005. - Precise analogue characterization of MIM capacitors using an improved charge-based capacitance measurement (CBCM) technique
Zhenqiu Ning,, Delecourt, H.-X., De Schepper, L., Gillon, R., Tack, M.Year:
2005
Language:
english
DOI:
10.1109/essder.2005.1546637
File:
PDF, 226 KB
english, 2005