[IEEE 2008 IEEE Ultrasonics Symposium (IUS) - Beijing,...

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[IEEE 2008 IEEE Ultrasonics Symposium (IUS) - Beijing, China (2008.11.2-2008.11.5)] 2008 IEEE Ultrasonics Symposium - Pure-shear mode BAW resonator consisting of (112̄0) textured AlN films

Yanagitani, Takahiko, Kiuch, Masato
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Year:
2008
Language:
english
DOI:
10.1109/ultsym.2008.0022
File:
PDF, 1.12 MB
english, 2008
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