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[MEMS Reference Shelf] MEMS Materials and Processes Handbook Volume 1 || MEMS Lithography and Micromachining Techniques
Ghodssi, Reza, Lin, PinyenVolume:
10.1007/97
Year:
2011
Language:
english
DOI:
10.1007/978-0-387-47318-5_9
File:
PDF, 3.35 MB
english, 2011