The relationship between structural evolution and electrical percolation of the initial stages of tungsten chemical vapor deposition on polycrystalline TiN
Rozenblat, A., Haimson, S., Shacham-Diamand, Y., Horvitz, D.Volume:
100
Year:
2012
Language:
english
DOI:
10.1063/1.3678194
File:
PDF, 1.78 MB
english, 2012