SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 29 July 2001)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries II - X-ray study of surfaces and interfaces
Asadchikov, Victor E., Bukreeva, Inna N., Duparre, Angela, Kozhevnikov, Igor V., Krivonosov, Yury S., Morawe, Christian, Pyatakhin, Mikhail V., Steinert, Joerg, Vinogradov, Alexander V., Ziegler, EricVolume:
4449
Year:
2001
Language:
english
DOI:
10.1117/12.450102
File:
PDF, 301 KB
english, 2001