Three-dimensional silicon micromachining
Azimi, S, Song, J, Dang, Z Y, Liang, H D, Breese, M B HVolume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/11/113001
Date:
November, 2012
File:
PDF, 1.68 MB
english, 2012