[IEEE IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan (19-23 Jan. 2003)] The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE - Fabrication of 3D microstructures with inclined/rotated UV lithography
Han, M., Woonseob Lee,, Sung-Keun Lee,, Lee, S.S.Year:
2003
Language:
english
DOI:
10.1109/memsys.2003.1189809
File:
PDF, 272 KB
english, 2003