Characterization of NbTiN Thin Films Deposited on Various...

IEEE Transactions on Appiled Superconductivity 2011 / 06 Vol. 21; Iss. 3

Characterization of NbTiN Thin Films Deposited on Various Substrates

Makise, Kazumasa, Terai, Hirotaka, Takeda, Masanori, Uzawa, Yoshinori, Wang, Zhen
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Volume:
21
Language:
english
Journal:
IEEE Transactions on Applied Superconductivity
DOI:
10.1109/tasc.2010.2088350
Date:
June, 2011
File:
PDF, 136 KB
english, 2011
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