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Characterization of NbTiN Thin Films Deposited on Various Substrates
Makise, Kazumasa, Terai, Hirotaka, Takeda, Masanori, Uzawa, Yoshinori, Wang, ZhenVolume:
21
Language:
english
Journal:
IEEE Transactions on Applied Superconductivity
DOI:
10.1109/tasc.2010.2088350
Date:
June, 2011
File:
PDF, 136 KB
english, 2011