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Simplified model for calculating the pressure dependence of a direct current planar magnetron discharge
Buyle, G., Depla, D., Eufinger, K., Haemers, J., De Gryse, R., De Bosscher, W.Volume:
21
Year:
2003
Language:
english
DOI:
10.1116/1.1572169
File:
PDF, 426 KB
english, 2003