Electron Beams in Capacitively Coupled Radio-Frequency Discharges
Schulze, J., Heil, B.G., Luggenholscher, D., Czarnetzki, U.Volume:
36
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2008.924404
Date:
August, 2008
File:
PDF, 482 KB
english, 2008