[IEEE 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Paris, France (2012.01.29-2012.02.2)] 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS) - Multiple tip nano probe actuators with integrated JFETs
Amponsah, Kwame, Lal, AmitYear:
2012
Language:
english
DOI:
10.1109/memsys.2012.6170418
File:
PDF, 1.66 MB
english, 2012