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[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Ultra thin AlN piezoelectric nano-actuators
Sinha, N., Wabiszewski, G.E., Mahameed, R., Felmetsger, V. V., Tanner, S. M., Carpick, R.W., Piazza, G.Year:
2009
Language:
english
DOI:
10.1109/sensor.2009.5285460
File:
PDF, 1.36 MB
english, 2009