Model Development for Atomic Force Microscope Stage Mechanisms
Smith, Ralph C., Hatch, Andrew G., De, Tathagata, Salapaka, Murti V., del Rosario, Ricardo C. H., Raye, Julie K.Volume:
66
Language:
english
Journal:
SIAM Journal on Applied Mathematics
DOI:
10.1137/05063307x
Date:
January, 2006
File:
PDF, 436 KB
english, 2006